MSA-100-3D micro system analyser
Posted On: 16 Mar 2017
The MSA-100-3D Micro System Analyser from Polytec is designed for 3D vibration analysis with high lateral resolution. It is especially suited for microsystems, precision mechanics parts and for studies on the dynamics of HGAs and secondary actuators in the data storage industry.
The instrument is based on a novel 3D vibrometer setup enabling pm-resolution for both out-of-plane and in-plane motion. It has a frequency bandwidth of 25 MHz. An integrated XY-traverse stage with full software support for high-precision sample movement enables scanned measurements for obtaining 3D deflection shapes.
The MSA-100-3D Micro System Analyzer solves many challenging development tasks. Sub-picometer amplitude resolution is achieved for both Out-Of-Plane (OOP) and In-Plane (IP) motion with a small laser spot resulting in high spatial resolution data. This combined with up to 25 MHz bandwidth real time data will open a realm of entirely new applications for the characterization of MEMS and other micro mechanical structures.