Micro & Nano Positioning

PI’s multi-axis piezo flexure stages allow positioning and scanning with sub-nanometer precision in up to 6 axes, including tip, tilt and yaw motion. Versions range from most compact cube design to large aperture and low profile. XYZ Scanners are all-rounders in positioning technology. Applications include sample adjustment, technology, optical metrology, fiber positioning and photonics, as well as atomic force microscopy.

Piezo flexure stages and objective scanners of the PIFOC and PInano series offer high dynamics in positioning and scanning tasks. Well adapted solutions for specimen positioning vertical to the optical axis and Z focusing of the objective are available as standard products.

PI’s nano positioning stages and scanners combine nanometer-precision resolution and guiding precision with minimum crosstalk. Linear piezo stages with PICMA piezo actuator drive and flexure guidings are available for travel ranges up to 1.5 mm.

The high stiffness of piezo flexure mirror platforms allows for high dynamics and excellent position stability. The compact devices are frequently used for beam deflection in laser processing and laser steering. Their parallel-kinematic design creates identical performance in tip and tilt axis, with a common fixed pivot point and no change of polarisation direction.

Miniature stages are essential in positioning tasks where available space is limited. Piezomotor solutions like Q-motion, PIline and PiezoWalk allow for the most compact stages due to their direct drive principle. PI’s stages with electromagnetic motors are present and proven in automation tasks worldwide.

Industrial applications in the production process such as laser processing benefit from the precise positioning accuracy of motorised positioning stages. Their low profile makes the variable stage series suitable for universal use, ranging from testing systems to production lines in precision automation. Standard stages are available in various load and precision classes for travel ranges up to 1 m.

The friction-free magnetic direct drive principle allows for most dynamic stages. Compared with motor-spindle-based stages, they use fewer mechanical components which results in less friction and backlash and thus more precision. PI’s PIglide stages combine the magnetic direct drive with highly precise preloaded air bearings for even better performance.

Vertical stages can be mounted on linear stages without adapter and allow for flexible combinations of multi-axis positioning systems with stepper, DC or brushless DC motor options.

Stability, precision and dynamics are crucial in the application fields of PI’s XY stages. They are the basis of high throughput rates and reliable operation. PI makes use of own developments in the fields of PIMag magnetic linear motors and PIglide air bearings. Industrial production and quality control benefit from PI’s high-load XY stages and planar scanners.

For microscopy applications e.g. in the field of topology measurement, fast, repeatable scanning is combined with best velocity constancy by PIline driven sample stages. Their low profile is outstanding in this field. Combination with piezo flexure sample stages makes them very versatile.

Torque motors are electromagnetic direct drives. They dispense with mechanical components in the drivetrain and transfer the drive force directly and friction-free to the motion platform. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets.

High-precision positioning due to low-play preloaded worm gear. Preloaded pivot bearings for high travel accuracy. Unlimited travel range in both directions of rotation.

PILine stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy consumption and heat generation are therefore considerably reduced. Applications with a low duty cycle that are battery-powered or heat-sensitive benefit from these characteristics.

Drive with high gear ratio for precision positioning. Can be combined for 2-axis motion with shared pivot point for precision micro-assembly, metrology and photonics alignment applications.

Parallel-kinematic design for six degrees of freedom, making it significantly more compact and stiff than serial-kinematic systems, higher dynamics, no moved cables: Higher reliability, reduced friction. Brushless DC motors are particularly suitable for high rotational speeds. They can be controlled very accurately and ensure high precision. Because they dispense with sliding contacts, they run smoothly, are wear-free and therefore achieve a long lifetime.

PIglide positioning systems have a magnetic linear motor, magnetically preloaded air bearings and an optical linear encoder. Non-contact and friction-free motion for the highest accuracy and reliability.

The PIglide planar scanner has magnetic linear motors, vacuum preload, and an absolute encoder. Contact and friction-free motion for the highest accuracy and reliability. The positioning system was designed to maximise the throughput and ensure the highest precision. Flexible coupling of the bridge axis to the gantry axis allows lateral decoupling without sacrificing the stiffness of the system.

The PIglide series of air-bearing rotation stages are designed for accuracy, precision, high stiffness, and ease of use. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. The stages offer superior travel accuracy, flatness, and wobble performance. Because they are friction free and require no maintenance or lubrication, they are ideal for use in cleanrooms.

The PI gantry systems have been designed to maximise throughput for applications requiring overhead motion. These stages are ideal for 3D printing, assembly, pick-and-place, alignment, inspection, and industrial automation applications.