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Park Systems is the leading nanotechnology solutions partner for the most challenging problems of nanoscale research and industrial applications.
Park Systems provides original and innovative AFM
Atomic Force Microscope
solutions for the most accurate nanoscale measurement. In nanoscale metrology, having data that is repeatable, reproducible, and reliable is just as crucial as resolution. The innovative crosstalk-elimination (XE) metrology platform ushered in a new era of nanometrology that overcomes non-linearity and non-orthogonality associated with conventional piezotube based systems. Park Systems' innovative AFM technology is a disruptive market force and it expands the application of nanometrology beyond the limits of conventional AFM technology.
Atomic Force Microscopes
Technology From: Park Systems
NX10
The NX10, the world's most accurate AFM
Atomic Force Microscope
, brings unparalleled imaging accuracy, scan speeds, and tip life to the next generation of researchers, all at an affordable price. It is the world's premium research-grade True Non-Contact AFM, featuring industry-leading Z-servo speed, XYZ scanner linearity, closed-loop detector noise, and minimised thermal drift. As a user-friendly AFM, the NX10 makes AFM convenient and intuitive for new and experienced users alike.
Key Features
- Accurate AFM Imaging by Crosstalk Elimination
- Industry leading XYZ scan linearity with two independent flexure scanners for sample and tip
- Best out-of-plane motion of less than 1nm over entire XY scan range
- Z scanner linearity of less than 0.015%
- Reduced XY scanner ringing by forward sine-scan algorithm
- Accurate AFM Scan by True Non-Contact Mode™
- Industry leading Z-scanner bandwidth of more than 9kHz, or Z-servo speed of more than 62mm/sec tip velocity
- Fastest scan speed in non-contact mode imaging
- Less tip wear for prolonged high-quality scans
- Minimised sample damage or modification
- Accurate AFM Measurement by True Sample Topography™
- Sample topography measured by industry leading low noise Z detector
- Industry leading, small forward and backward scan gap of less than 0.15%
- Minimised system drift and hysteresis by thermally matched components
- Active temperature control of acoustic enclosure
- NX User Productivity
- Easy tip exchange with wide open side access to the tip and sample
- Easy, intuitive laser alignment with pre-aligned tip mount and patented on-axis, top down view
- Fast automatic tip approach to sample surface within 10 seconds
- 24 bit digital electronics with three internal lock-ins, Q-control, and spring constant calibration
XE Series AFM
Technology From: Park Systems
XE-Bio
XE-Bio is a powerful 3-in-1 nanoscience research tool that uniquely combines the industry's only True Non-Contact AFM
Atomic Force Microscope
with Ion Conductance Microscopy (ICM) and inverted optical microscope on the same platform. The modular design of the XE-Bio allows easy exchange between non-contact AFM and ICMIon Conductance Microscopy
. Designed for non-invasive in-liquid imaging, the combined imaging capability of AFM, ICM, and inverted optical microscopy makes the XE-Bio ideal for imaging biological samples, such as living cells, in dynamic conditions. Moreover, ICM can be adapted to enable a host of powerful applications in nanoscale electrophysiology.
Key Features
- Powerful 3-in-1 Nanoscale Research Tool with Modular Platform
- True Non-Contact Atomic Force Microscope (AFM)
- Ion Conductance Microscope (ICM)
- Inverted Optical Microscope
- Ultimate AFM Resolution by True Non-Contact Mode™
- 10 times larger Z-scan bandwidth than a piezotube
- Less tip wear for prolonged high-quality and high-resolution imaging
- Minimised sample damage or modification
- Immunity from parameter-dependent results observed in tapping imaging
- Single molecule Force-Distance spectroscopy with automated data analysis
- Non-invasive In-liquid Imaging by ICM
- Monitoring ion channels of single living cells
- Unique functional capability of targeted localised stimulation
- Enable nanoscale patch-clamping for electrophysiology
- Environmental chamber for temperature, pH, and humidity control
- Fully Integrated Inverted Optical Microscope
- Compatible with phase contrast and DICDifferential Interference Contrastimaging
- Also compatible with fluorescence microscopy
- Advanced image overlay functions
Technology From: Park Systems
XE-NSOM
Built on the award-winning XE-100 AFM
Atomic Force Microscope
platform, the XE-NSOMNear-Field Scanning Optical Microscope
is designed to provide the most stable measurement conditions for both topography and NSOM measurements. Its dedicated optical modules, allowing access to the top, side, and bottom of the sample, facilitate a variety of NSOM configurations including transmission and reflection mode. With the precise feedback control of the XE AFM platform, the XE-NSOM sets a new standard for accurate observation of near-field optical phenomena.
Key Features
- Artefact-Free Imaging by Crosstalk Elimination
- Two independent, closed-loop XY and Z flexure scanners for sample and tip
- Out-of-plane motion of less than 2nm over entire scan range
- Flat and linear XY scan of up to 100µm × 100µm with low residual bow
- Up to 25µm Z-scan by high force scanner
- Accurate height measurement
- Dedicated Optical Modules for Various NSOM Modes and Experiments
- Supports transmission, collection, and reflection modes
- Open access for optical coupling such as fluorescence and Raman spectroscopy for TERSTip enhanced Raman Spectroscopy
- Three dedicated optical modules for top, side, and bottom access
- Compatible with aperture/apertureless NSOM
- Integrated with inverted optical microscopes for advanced optical measurements
- Digital outputs for synchronization with external devices
- Ultimate AFM Resolution by True Non-Contact Mode
- 10 times larger Z-scan bandwidth than a piezotube
- Less tip wear for prolonged high-quality and high resolution imaging
- Minimised sample damage or modification
- Immunity from parameter-dependent results observed in tapping mode
Technology From: Park Systems
XE-70
XE-70 is an affordable solution that does not compromise any of the innovative technologies of the XE-series that sets it apart from conventional AFM
Atomic Force Microscope
s, supporting the same modes, options, and electronics as all other systems in the XE product line.
Key Features
- Artefact Free Imaging by Crosstalk Elimination
- Two independent, closed- loop XY and Z flexure scanners for sample and tip
- Flat and linear XY scan of up to 100µm × 100µm with low residual bow
- Out of plane motion of less than 2nm over entire scan range
- Up to 25µm Z-scan by high force scanner
- Accurate height measurements
- Ultimate AFM Resolution by True Non-Contact Mode™
- 10 times larger Z-scan bandwidth than a piezotube
- Less tip wear for prolonged high-quality and high-resolution imaging
- Minimised sample damage or modification
- Immunity from parameter-dependent results observed in tapping imaging
- User Convenience by EZ Design
- Open side access for easy sample or tip exchange
- Dovetail-lock mount for easy head removal
- Direct on-axis optics for high resolution optical viewing
Technology From: Park Systems
XE-100
The XE-100 has a reduced drift rate and the Step-and-Scan Automation that provides the ultimate AFM
Atomic Force Microscope
/SPMScanning Probe Microscopy
performance in Non-Contact nanoscale metrology. It is a mid-priced system for materials science, polymers, electrochemistry and other applications in nanoscience and engineering. It can adopt a wide range of optical coupling with its open side access.
Key Features
- Artefact Free Imaging by Crosstalk Elimination
- Two independent, closed- loop XY and Z flexure scanners for sample and tip
- Out of plane motion of less than 2nm over entire scan range
- Flat and linear XY scan of up to 100µm × 100µm with low residual bow
- Up to 25µm Z-scan by high force scanner
- Accurate height measurements
- Reduced drift rate of less than 0.5nm/min
- Ultimate AFM Resolution by True Non-Contact Mode™
- 10 times larger Z-scan bandwidth than a piezotube
- Less tip wear for prolonged high-quality and high-resolution imaging
- Minimized sample damage or modification
- Immunity from parameter-dependent results observed in tapping imaging
- User Convenience by EZ Design
- Wide open access to the tip and sample
- Snap tip exchange and EZ Laser beam alignment
- Dovetail-lock mount for easy head removal
- Direct on-axis optics for high resolution optical viewing
- Motorized optics stage
- Full Option Compatibility with Modular Platform
- Full SPM modes and options
- Open side access for optical coupling
- Motorised sample stage with Step-and-Scan automated measurements
Technology From: Park Systems
XE-120
The XE-120 is an exceptional AFM
Atomic Force Microscope
with expanded sample and interactivity flexibility. It is a research grade AFM with the industry's only True Non-Contact mode™ imaging for both air and liquid imaging. Flexible configurations allow integration with other advanced optical measurement techniques such as Raman spectroscopy.
Key Features
- Artefact Free Imaging by Crosstalk Elimination
- Two independent, closed- loop XY and Z flexure scanners for sample and tip
- Out of plane motion of less than 2nm over entire scan range
- Flat and linear XY scan of up to 100µm × 100µm with low residual bow
- Up to 25µm Z-scan by high force scanner
- Accurate height measurements
- Ultimate AFM Resolution by True Non-Contact Mode™
- 10 times larger Z-scan bandwidth than a piezotube
- Less tip wear for prolonged high-quality and high-resolution imaging
- Minimised sample damage or modification
- Immunity from parameter-dependent results observed in tapping imaging
- User Convenience by EZ Design
- Open side access for easy sample or tip exchange
- Dovetail-lock mount for easy head removal
- Direct on-axis optics for high resolution optical viewing
- Motorised optics stage
- Advanced Optical Integration and Option Compatibility
- Integrated with inverted optical microscopes
- Tight mechanical coupling yields excellent noise performance
- Compatible with both reflection and transmission optical viewing
- Open side access for optical coupling such as Raman spectroscopy for TERSTip enhanced Raman Spectroscopy
- Access to all advanced SPMScanning Probe Microscopymodes and options
Technology From: Park Systems
XE-150
Non-Contact AFM
Atomic Force Microscope
imaging has become the most feasible and practical way to scan your large samples with ultimate AFM resolution and reliability. The XY motorised sample stage is optimised for both small and large sample placement, 150mm × 150mm, and allows full travel over the entire sample. Also, the Step-and-Scan automated sample measurement greatly minimises user-required presence during system operation.
Key Features
- Artefact Free Imaging by Crosstalk Elimination
- Two independent, closed-loop XY and Z flexure scanners for sample and tip
- Flat and linear XY scan of 100µm x 100µm with low residual bow
- Out of plane motion of less than 2 nm over entire scan range
- Up to 25µm Z-scan by high force scanner
- Accurate height measurements
- Ultimate AFM Resolution by True Non-Contact Mode™
- 10 times larger Z-scan bandwidth than a piezotube
- Less tip wear for prolonged high-quality and high-resolution imaging
- Minimised sample damage or modification
- Immunity from parameter-dependent results observed in tapping imaging
- User Convenience by EZ Design
- Open side access for easy sample or tip exchange
- Dovetail-lock mount for easy head removal
- Direct on-axis optics for high resolution optical viewing
- Motorised optics stage
- Advanced Option Compatibility with Modular Platform
- Full SPMScanning Probe Microscopymodes and options
- Open side access for optical coupling
- Automated sample measurements with motorised sample stage
- Full travel range over 150mm wafer (No sample rotation required)
Industrial AFM
Technology From: Park Systems
Industrial AFM
Park Systems offers fully-automated Atomic Force Microscopy systems designed for process monitoring and characterisation of critical topographies such as step heights, surface roughness, overhang and trench profiles, sidewall roughness, and critical angle measurements. Using an ultra-sharp tip that maintains its shape via True Non-Contact imaging mode, the XE-series AFM
Atomic Force Microscope
s create a high-resolution reconstruction of surfaces and three dimensional structures.
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