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MEMS


Microsystem & MEMS Analysers

Microsystem & MEMS Analysers

Polytec has developed an innovative line of microscope-based systems to measure the dynamics and topography of microsystems and MEMS devices.
Technology From: Polytec

Microsystem & MEMS Analysers

Inspired by the need to characterise the dynamics of the growing variety of micro-electromechanical systems (MEMS), Polytec has developed an innovative line of microscope-based systems to measure the dynamics and topography of microsystems and MEMS devices.

The MSA-500 Micro System Analyser is the premier measurement tool for the analysis and visualisation of structural vibrations and surface topography in microstructures. For wafer-level testing, most systems can easily be mounted onto manual or automated probe stations.

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SAW & RF MEMS Analysers

SAW & RF MEMS Analysers

Complete with a new optical design, the instrument retains the advantages and features familiar to laser vibrometer users.
Technology From: Polytec

SAW & RF MEMS Analysers

The UHF-120 Vibrometer can characterise the out-of-plane vibrations at ultra-high frequencies, extending the vibration frequency bandwidth up to 1.2GHz. Complete with a new optical design, the instrument retains the advantages and features familiar to laser vibrometer users.

The system consists of a heterodyne interferometer with a controller box. The optical head provides a heterodyne detector signal that is acquired with a fast digital oscilloscope. The digitized detector signal is transferred to a PC where the heterodyne carrier is demodulated by a new software module in Polytec's Vibsoft package.

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Surface Metrology

Surface Metrology

The AVT-1000 Advanced Vibrometry Tester enables you to measure all critical parameters such as roughness, waviness, and defects across the whole surface of the sample providing important information for process optimisation.
Technology From: Polytec

Surface Metrology

Hard disk drives are manufactured with nanometre precision. The slightest change in manufacturing can cause surface roughness variations large enough to cause failures in the field. For the best yields it is necessary to optimise your process. Measuring and understanding the characteristics of your product allows continuous improvement.

The AVT-1000 Advanced Vibrometry Tester enables you to measure all critical parameters such as roughness, waviness, and defects across the whole surface of the sample providing important information for process optimisation. No other technique can give you such precise, quick, and full surface measurement results.

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All products and information are subject to change without notice.